Inventor
NIKULIN SERGE L
US5 patents
⚠️ This page may combine multiple inventors who share the name “NIKULIN SERGE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAFEVIEW INC
3 patentsAPPLIED MATERIALS INC
2 patentsUS6382129B1May 7, 2002
Semiconductor wafer processor, plasma generating apparatus, magnetic field generator, and method of generating a magnetic field
APPLIED MATERIALS INC21 citations90
US6164240ADec 26, 2000
Semiconductor wafer processor, plasma generating apparatus, magnetic field generator, and method of generating a magnetic field
APPLIED MATERIALS INC29 citations90