Inventor
CHOUNO YASUHIRO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “CHOUNO YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7086410B2Aug 8, 2006
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD27 citations92
US5503171AApr 2, 1996
Substrates-washing apparatus
TOKYO ELECTRON LTD46 citations89
US7445689B2Nov 4, 2008
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD9 citations82
US6186171B1Feb 13, 2001
Pneumatically driven liquid supply apparatus
TOKYO ELECTRON LTD8 citations73
US7180035B2Feb 20, 2007
Substrate processing device
TOKYO ELECTRON LTD0 citations51