Inventor
NAKANISHI NARUHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NAKANISHI NARUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6544834B1Apr 8, 2003
Method of forming a semiconductor device including a capacitor with tantalum oxide (Ta2O5)
HITACHI LTD26 citations90
US6664157B2Dec 16, 2003
Semiconductor integrated circuit device and the method of producing the same
HITACHI LTD7 citations73
US6627497B2Sep 30, 2003
Semiconductor integrated circuit device and method of manufacturing the same
HITACHI LTD7 citations71
US6583463B1Jun 24, 2003
Semiconductor integrated circuit device with information storage capacitor having ruthenium dioxide lower electrode and crystallized TA2O5 capacitor insulator
HITACHI LTD6 citations71
US6713343B2Mar 30, 2004
Method of forming a semiconductor device with a capacitor including a polycrystalline tantalum oxide film dielectric
HITACHI LTD3 citations60
ELPIDA MEMORY INC
4 patentsUS7754563B2Jul 13, 2010
Nanolaminate-structure dielectric film forming method
ELPIDA MEMORY INC4 citations60
US7691743B2Apr 6, 2010
Semiconductor device having a capacitance element and method of manufacturing the same
ELPIDA MEMORY INC2 citations60
US7872294B2Jan 18, 2011
Semiconductor device having a capacitance element and method of manufacturing the same
ELPIDA MEMORY INC1 citations50
US7763500B2Jul 27, 2010
Method for manufacturing semiconductor storage device comprising a slow cooling step
ELPIDA MEMORY INC0 citations50