Inventor
RAU JOHANNES
DE16 patents
⚠️ This page may combine multiple inventors who share the name “RAU JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
5 patentsUS7729065B2Jun 1, 2010
Optical element unit
ZEISS CARL SMT AG11 citations83
US6791768B2Sep 14, 2004
Arrangement for securing a mount of an optical element
ZEISS CARL SMT AG12 citations73
US7239462B2Jul 3, 2007
Objective with at least one optical element
ZEISS CARL SMT AG6 citations62
US7265919B2Sep 4, 2007
Flange assembly of an optical system
ZEISS CARL SMT AG0 citations50
US7551375B2Jun 23, 2009
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly
ZEISS CARL SMT AG0 citations49