Inventor

MAHLMANN MARTIN

DE7 patents

⚠️ This page may combine multiple inventors who share the name “MAHLMANN MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents

US9557653B2Jan 31, 2017

ZEISS CARL SMT AG

2 patents

US7548387B2Jun 16, 2009

Optical imaging device

ZEISS CARL SMT AG4 citations60

US7265919B2Sep 4, 2007

Flange assembly of an optical system

ZEISS CARL SMT AG0 citations50

RAU JOHANNES

1 patent

US8300210B2Oct 30, 2012

Optical projection system

RAU JOHANNES3 citations60

SIGEL BENJAMIN

1 patent

US9030644B2May 12, 2015

Projection exposure apparatus for semiconductor lithography including an actuator system

SIGEL BENJAMIN1 citations39