Inventor
TERASHIMA SHIGERU
JP34 patents
⚠️ This page may combine multiple inventors who share the name “TERASHIMA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
31 patentsUS6721031B2Apr 13, 2004
Exposure apparatus
CANON KK52 citations96
US5995582ANov 30, 1999
X-ray reduction exposure apparatus and device manufacturing method using the same
CANON KK56 citations96
US6954255B2Oct 11, 2005
Exposure apparatus
CANON KK30 citations93
US6721032B2Apr 13, 2004
Exposure apparatus and control method therefor, and device manufacturing method
CANON KK24 citations93
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US6984362B2Jan 10, 2006
Processing apparatus, measuring apparatus, and device manufacturing method
CANON KK26 citations92
US6616898B2Sep 9, 2003
Processing apparatus with pressure control and gas recirculation system
CANON KK36 citations92
US6225637B1May 1, 2001
Electron beam exposure apparatus
CANON KK43 citations92
US6054713AApr 25, 2000
Electron beam exposure apparatus
CANON KK41 citations92
US5600698AFeb 4, 1997
X-ray exposure apparatus
CANON KK28 citations92
US7050152B2May 23, 2006
Exposure apparatus
CANON KK16 citations84
US6750946B2Jun 15, 2004
Processing apparatus for processing sample in predetermined atmosphere
CANON KK14 citations84
US6463119B1Oct 8, 2002
Exposure method, exposure apparatus and semiconductor manufacturing apparatus
CANON KK15 citations84
US5131022AJul 14, 1992
Exposure method and apparatus
CANON KK20 citations82
US7123343B2Oct 17, 2006
Exposure apparatus and device manufacturing method
CANON KK6 citations74
US6934003B2Aug 23, 2005
Exposure apparatus and device manufacturing method
CANON KK6 citations74
US6453000B1Sep 17, 2002
Exposure method, exposure device and semiconductor device manufacturing method
CANON KK8 citations74
US11036149B2Jun 15, 2021
Imprint apparatus, method of operating the same, and method of manufacturing article
CANON KK2 citations72
US7738076B2Jun 15, 2010
Exposure apparatus and device manufacturing method
CANON KK3 citations63
US7566422B2Jul 28, 2009
Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus
CANON KK3 citations63
US7212273B2May 1, 2007
Exposure apparatus and method of producing device
CANON KK6 citations63
US7027131B2Apr 11, 2006
Exposure apparatus
CANON KK4 citations63
US6603833B2Aug 5, 2003
X-ray exposure apparatus
CANON KK2 citations63
US6351512B1Feb 26, 2002
X-ray exposure apparatus
CANON KK2 citations63
US5790630AAug 4, 1998
Radiation window and radiation system using the same
CANON KK4 citations63
US12097652B2Sep 24, 2024
Imprint apparatus and method for manufacturing article
CANON KK0 citations62
US11745410B2Sep 5, 2023
Imprint apparatus and method for manufacturing article
CANON KK1 citations62
US8980533B2Mar 17, 2015
Supply apparatus which supplies radicals, lithography apparatus, and method of manufacturing article
CANON KK0 citations52
US6418187B1Jul 9, 2002
X-ray mask structure, and X-ray exposure method and apparatus using the same
CANON KK1 citations52
US7724348B2May 25, 2010
Exposure apparatus and method, and device manufacturing method
CANON KK0 citations50
US8004657B2Aug 23, 2011
Exposure apparatus, control method for the same, and device manufacturing method
CANON KK0 citations36