Inventor
TAKAHASHI RIKA
JP2 patents
Patents
2 patentsUS8741510B2Jun 3, 2014
Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device
CANON KK4 citations65
US9116444B2Aug 25, 2015
Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device
CANON KK0 citations44