Inventor

SATO MASATERU

JP17 patents

⚠️ This page may combine multiple inventors who share the name “SATO MASATERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SATO MASATERU

SEN CORP

Insulation structure of high voltage electrodes for ion implantation apparatus

Insulation structure and insulation method

Ion generation method and ion source

Ion source device and ion beam generating method

Supporting structure and ion generator using the same

SUMITOMO HEAVY IND ION TECH CO LTD

Beam extraction slit structure and ion source

Plasma generator and thermal electron emitter

Antenna cover and plasma generating device using same

Ion generator and thermal electron emitter

SUMITOMO EATON NOVA

Ion implanting apparatus

Ion implanting system

Ion source apparatus and electronic energy optimized method therefor

EATON CORP

Ion source having wide output current operating range

SEN CORP AN SHI AND AXCELIS COMPANY

Ion source apparatus and cleaning optimized method thereof

FUJITSU LTD

Magnetic head arm, method of producing the same and apparatus for producing the same

SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD

Ion generator and ion generating method

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD

Ion implantation apparatus and method of cleaning ion implantation apparatus