Inventor
YU CHENG-YEN
TW9 patents
Patents
9 patentsUS9991385B2Jun 5, 2018
Enhanced volume control by recess profile control
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US9564528B2Feb 7, 2017
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US11855222B2Dec 26, 2023
Semiconductor device for recessed fin structure having rounded corners
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US11705519B2Jul 18, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043593B2Jun 22, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12495572B2Dec 9, 2025
Semiconductor device for recessed fin structure having rounded corners
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11387365B2Jul 12, 2022
Method of manufacturing a semiconductor device for recessed fin structure having rounded corners
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10483394B2Nov 19, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10043906B2Aug 7, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51