Inventor

SRINIVASAN SUNIL

US25 patents

⚠️ This page may combine multiple inventors who share the name “SRINIVASAN SUNIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SRINIVASAN SUNIL

APPLIED MATERIALS INC

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

Adjustable extended electrode for edge uniformity control

Composite edge ring

Method of controlling ion energy distribution using a pulse generator

Adjustable extended electrode for edge uniformity control

Adjustable extended electrode for edge uniformity control

Adjustable extended electrode for edge uniformity control

Adjustable extended electrode for edge uniformity control

Wafer edge ring lifting solution

Cryogenic atomic layer etch with noble gases

Cryogenic atomic layer etch with noble gases

Wafer edge ring lifting solution

Cryogenic atomic layer etch with noble gases

Integrated cleaning process for substrate etching

Integrated cleaning process for substrate etching

In-situ deposition process

Universal process kit

Systems and methods for controlling a voltage waveform at a substrate during plasma processing

Reducing aspect ratio dependent etch with direct current bias pulsing

SASANO HIROKI

Shallow trench isolation etch process

SRINIVASAN SUNIL

Multi-film stack etching with polymer passivation of an overlying etched layer

PLUMHOFF JASON

Method to minimize CD etch bias