Inventor
IWANAGA TAKURO
JP3 patents
Patents
3 patentsUSRE49657ESep 12, 2023
Epitaxial wafer manufacturing method and epitaxial wafer
SUMCO CORP0 citations58
US10453682B2Oct 22, 2019
Epitaxial wafer manufacturing method and epitaxial wafer
SUMCO CORP0 citations48
US10062569B2Aug 28, 2018
Epitaxial wafer manufacturing method and epitaxial wafer
SUMCO CORP0 citations48