Inventor
WAMURA YU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “WAMURA YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9748104B2Aug 29, 2017
Method of depositing film
TOKYO ELECTRON LTD280 citations97
US8896097B2Nov 25, 2014
Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor
TOKYO ELECTRON LTD16 citations83
US9929008B2Mar 27, 2018
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD12 citations82
US9293543B2Mar 22, 2016
Film forming method and film forming apparatus
TOKYO ELECTRON LTD5 citations72
US9435026B2Sep 6, 2016
Film deposition apparatus
TOKYO ELECTRON LTD4 citations64
US12368030B2Jul 22, 2025
Deposition method and deposition apparatus
TOKYO ELECTRON LTD1 citations63
US9165780B2Oct 20, 2015
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations62
US8895456B2Nov 25, 2014
Method of depositing a film
TOKYO ELECTRON LTD2 citations61
US10053776B2Aug 21, 2018
Method of detoxifying exhaust pipe and film forming apparatus
TOKYO ELECTRON LTD0 citations50
US9418837B2Aug 16, 2016
Semiconductor device manufacturing method and substrate treatment system
TOKYO ELECTRON LTD0 citations49
US10793432B2Oct 6, 2020
Output inspection method for ozone mass flow controller
TOKYO ELECTRON LTD0 citations40
US10472719B2Nov 12, 2019
Nozzle and substrate processing apparatus using same
TOKYO ELECTRON LTD0 citations39