P

Inventor

MIZOTA SHOGO

TW7 patents
⚠️ This page may combine multiple inventors who share the name “MIZOTA SHOGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents
US10500617B2Dec 10, 2019

Substrate liquid treatment apparatus, tank cleaning method and non-transitory storage medium

TOKYO ELECTRON LTD5 citations69
US10236192B2Mar 19, 2019

Liquid processing apparatus, liquid processing method, and storage medium

TOKYO ELECTRON LTD5 citations68
US9192878B2Nov 24, 2015

Liquid processing apparatus

TOKYO ELECTRON LTD5 citations68
US7678199B2Mar 16, 2010

Substrate cleaning method

TOKYO ELECTRON LTD0 citations41
US9862007B2Jan 9, 2018

Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein

TOKYO ELECTRON LTD0 citations38

NISHI KENJI

1 patent
US9305767B2Apr 5, 2016

Liquid processing apparatus, liquid processing method and storage medium

NISHI KENJI5 citations72

MINAMI TERUOMI

1 patent
US8303723B2Nov 6, 2012

Liquid processing apparatus, liquid processing method, and storage medium

MINAMI TERUOMI1 citations48