Inventor
LIU TZUNG-SHIUN
TW5 patents
Patents
5 patentsUS10969682B2Apr 6, 2021
Apparatus and method for developing a photoresist coated substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10698313B2Jun 30, 2020
Apparatus and method for developing a photoresist coated substrate
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11226551B2Jan 18, 2022
Lithographic mask, a pellicle therein and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9829786B2Nov 28, 2017
PSM blank for enhancing small size CD resolution
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US10802395B2Oct 13, 2020
Lithographic mask, a pellicle therein and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48