Inventor
OKUNO MASANORI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OKUNO MASANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
8 patentsUS11236743B2Feb 1, 2022
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP3 citations71
US12341000B2Jun 24, 2025
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US12365982B2Jul 22, 2025
Processing apparatus and exhaust system
KOKUSAI ELECTRIC CORP0 citations58
US11966210B2Apr 23, 2024
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11237538B2Feb 1, 2022
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11827982B2Nov 28, 2023
Processing apparatus
KOKUSAI ELECTRIC CORP0 citations48
US12371782B2Jul 29, 2025
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations46
US12080149B2Sep 3, 2024
Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations46