Inventor
YONEJIMA TOSHIHIKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “YONEJIMA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
5 patentsUS11236743B2Feb 1, 2022
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP3 citations71
US12341000B2Jun 24, 2025
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US12365982B2Jul 22, 2025
Processing apparatus and exhaust system
KOKUSAI ELECTRIC CORP0 citations58
US11827982B2Nov 28, 2023
Processing apparatus
KOKUSAI ELECTRIC CORP0 citations48
US12371782B2Jul 29, 2025
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations46