Inventor
GOLOTSVAN ANNA
IL13 patents
⚠️ This page may combine multiple inventors who share the name “GOLOTSVAN ANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
9 patentsUS12001148B2Jun 4, 2024
Enhancing performance of overlay metrology
KLA CORP2 citations70
US11761969B2Sep 19, 2023
System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback
KLA CORP4 citations70
US11726410B2Aug 15, 2023
Multi-resolution overlay metrology targets
KLA CORP2 citations70
US11809090B2Nov 7, 2023
Composite overlay metrology target
KLA CORP2 citations69
US11353799B1Jun 7, 2022
System and method for error reduction for metrology measurements
KLA CORP5 citations68
US11592755B2Feb 28, 2023
Enhancing performance of overlay metrology
KLA CORP1 citations59
US12222199B2Feb 11, 2025
Systems and methods for measurement of misregistration and amelioration thereof
KLA CORP0 citations50
US11862521B2Jan 2, 2024
Multiple-tool parameter set calibration and misregistration measurement system and method
KLA CORP0 citations50
US11615974B2Mar 28, 2023
Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing
KLA CORP0 citations49
KLA TENCOR CORP
4 patentsUS12013634B2Jun 18, 2024
Reduction or elimination of pattern placement error in metrology measurements
KLA TENCOR CORP0 citations61
US11537043B2Dec 27, 2022
Reduction or elimination of pattern placement error in metrology measurements
KLA TENCOR CORP0 citations61
US11353493B2Jun 7, 2022
Data-driven misregistration parameter configuration and measurement system and method
KLA TENCOR CORP0 citations48
US11551980B2Jan 10, 2023
Dynamic amelioration of misregistration measurement
KLA TENCOR CORP0 citations44