Inventor
PU LINGLING
US15 patents
⚠️ This page may combine multiple inventors who share the name “PU LINGLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS11216938B2Jan 4, 2022
Systems and methods of optimal metrology guidance
ASML NETHERLANDS BV9 citations84
US11527405B2Dec 13, 2022
In-die metrology methods and systems for process control
ASML NETHERLANDS BV2 citations72
US11126089B2Sep 21, 2021
Method for determining corrections to features of a mask
ASML NETHERLANDS BV5 citations71
US12080513B2Sep 3, 2024
Cross-talk cancellation in multiple charged-particle beam inspection
ASML NETHERLANDS BV0 citations62
US12040187B2Jul 16, 2024
In-die metrology methods and systems for process control
ASML NETHERLANDS BV0 citations62
US11842420B2Dec 12, 2023
Method and apparatus for adaptive alignment
ASML NETHERLANDS BV0 citations62
US11308635B2Apr 19, 2022
Method and apparatus for adaptive alignment
ASML NETHERLANDS BV0 citations62
US11756187B2Sep 12, 2023
Systems and methods of optimal metrology guidance
ASML NETHERLANDS BV0 citations61
US12191112B2Jan 7, 2025
System and method for defect inspection using voltage contrast in a charged particle system
ASML NETHERLANDS BV0 citations59
US12529966B2Jan 20, 2026
Machine learning based image generation for model base alignments
ASML NETHERLANDS BV0 citations58
US12230013B2Feb 18, 2025
Fully automated SEM sampling system for e-beam image enhancement
ASML NETHERLANDS BV0 citations58
US11769317B2Sep 26, 2023
Fully automated SEM sampling system for e-beam image enhancement
ASML NETHERLANDS BV0 citations58
US12505974B2Dec 23, 2025
Systems and methods for focusing charged—particle beams
ASML NETHERLANDS BV0 citations55
US11694312B2Jul 4, 2023
Image enhancement for multi-layered structure in charged-particle beam inspection
ASML NETHERLANDS BV0 citations47