Inventor

SELIGER ROBERT L

20 patents

⚠️ This page may combine multiple inventors who share the name “SELIGER ROBERT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SELIGER ROBERT L

HUGHES AIRCRAFT CO

Alignment process using serial detection of repetitively patterned alignment marks

Separated ion source

Focused ion beam column

Alignment process using serial detection of repetitively patterned alignment marks

Filament dispenser cathode

Alloys for liquid metal ion sources

Ion implantation system

Ion beam lithography process and apparatus using step-and-repeat exposure

Ion implantation system

Method and apparatus for securing integrated circuits from unauthorized copying and use

Hybrid focused-flood ion beam system and method

Focused ion beam microfabrication column

Process for channeling ion beams

Dual discharge plasma device

Process for making patterns in resist and for making ion absorption masks useful therewith

Focusing ion accelerator

High resolution masking process for minimizing scattering and lateral deflection in collimated ion beams

HUGHES ELECTRONICS CORP

Virtual display screen system

ACCELERATORS INC

Method and apparatus for extracting well-formed, high current ion beams from a plasma source

US NAVY

Field-effect transistor with extended linear logarithmic transconductance