Inventor
GRONET CHRISTIAN M
US20 patents
⚠️ This page may combine multiple inventors who share the name “GRONET CHRISTIAN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS5689614ANov 18, 1997
Rapid thermal heating apparatus and control therefor
APPLIED MATERIALS INC135 citations99
US5487127AJan 23, 1996
Rapid thermal heating apparatus and method utilizing plurality of light pipes
APPLIED MATERIALS INC116 citations99
US5155336AOct 13, 1992
Rapid thermal heating apparatus and method
APPLIED MATERIALS INC322 citations99
US6037273AMar 14, 2000
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC139 citations97
US5743643AApr 28, 1998
Rapid thermal heating apparatus and method
APPLIED MATERIALS INC59 citations97
US5317492AMay 31, 1994
Rapid thermal heating apparatus and method
APPLIED MATERIALS INC81 citations97
US6434327B1Aug 13, 2002
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
APPLIED MATERIALS INC57 citations96
US6122439ASep 19, 2000
Rapid thermal heating apparatus and method
APPLIED MATERIALS INC44 citations96
US6016383AJan 18, 2000
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
APPLIED MATERIALS INC66 citations96
US5840125ANov 24, 1998
Rapid thermal heating apparatus including a substrate support and an external drive to rotate the same
APPLIED MATERIALS INC38 citations96
US5790751AAug 4, 1998
Rapid thermal heating apparatus including a plurality of light pipes and a pyrometer for measuring substrate temperature
APPLIED MATERIALS INC44 citations96
US5767486AJun 16, 1998
Rapid thermal heating apparatus including a plurality of radiant energy sources and a source of processing gas
APPLIED MATERIALS INC27 citations96
US5708755AJan 13, 1998
Rapid thermal heating apparatus and method
APPLIED MATERIALS INC25 citations96
US5683173ANov 4, 1997
Cooling chamber for a rapid thermal heating apparatus
APPLIED MATERIALS INC49 citations96
US6410456B1Jun 25, 2002
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC25 citations92
US6402850B1Jun 11, 2002
Depositing polysilicon films having improved uniformity and apparatus therefor
APPLIED MATERIALS INC28 citations92
US6159866ADec 12, 2000
Method for insitu vapor generation for forming an oxide on a substrate
APPLIED MATERIALS INC35 citations92
US5576059ANov 19, 1996
Depositing polysilicon films having improved uniformity and apparatus therefor
APPLIED MATERIALS INC39 citations92