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Inventor
SAKURADA YUZO
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “SAKURADA YUZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC CORP
4 patents
US5751002A
May 12, 1998
Ion implantation apparatus
ULVAC CORP
35 citations
85
US5028795A
Jul 2, 1991
Ion implantation apparatus
ULVAC CORP
9 citations
71
US4983850A
Jan 8, 1991
Ion implantation device
ULVAC CORP
17 citations
67
US5838112A
Nov 17, 1998
Parallel scan type ion implanter
ULVAC CORP
13 citations
66
ULVAC INC
1 patent
US6930316B2
Aug 16, 2005
Ion implantation system and ion implantation method
ULVAC INC
60 citations
90
ULVAC CO LTD
1 patent
US7511288B2
Mar 31, 2009
Ion implantation device
ULVAC CO LTD
7 citations
65