Inventor
IKENO MASAHIKO
JP11 patents
Patents
11 patentsUS5264246ANov 23, 1993
Spin coating method
MITSUBISHI ELECTRIC CORP68 citations95
US5095848AMar 17, 1992
Spin coating apparatus using a tilting chuck
MITSUBISHI ELECTRIC CORP70 citations95
US6437862B1Aug 20, 2002
Defect inspection apparatus
MITSUBISHI ELECTRIC CORP35 citations92
US6016562AJan 18, 2000
Inspection data analyzing apparatus for in-line inspection with enhanced display of inspection results
MITSUBISHI ELECTRIC CORP49 citations92
US4987477AJan 22, 1991
Solid state imaging device
MITSUBISHI ELECTRIC CORP26 citations92
US4886012ADec 12, 1989
Spin coating apparatus
MITSUBISHI ELECTRIC CORP47 citations91
US5135891AAug 4, 1992
Method for forming film of uniform thickness on semiconductor substrate having concave portion
MITSUBISHI ELECTRIC CORP19 citations81
US4821675AApr 18, 1989
Color filter dyeing apparatus
MITSUBISHI ELECTRIC CORP10 citations72
US6636824B1Oct 21, 2003
Method of and apparatus for inspecting semiconductor device
MITSUBISHI ELECTRIC CORP9 citations70
US5155060AOct 13, 1992
Method for forming film of uniform thickness on semiconductor substrate having concave portion
MITSUBISHI ELECTRIC CORP3 citations62
US4960658AOct 2, 1990
Color filter dyeing apparatus
MITSUBISHI ELECTRIC CORP5 citations61