Inventor

MICHAELIS ALEXANDER

US20 patents

⚠️ This page may combine multiple inventors who share the name “MICHAELIS ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICHAELIS ALEXANDER

INFINEON TECHNOLOGIES AG

Semiconductor structures and manufacturing methods

Self-aligned buried strap for vertical transistors

Method of forming a vertically oriented device in an integrated circuit

Integrated circuit vertical trench device and method of forming thereof

Method for expanding trenches by an anisotropic wet etch

Integrated circuit trench device with a dielectric collar stack, and method of forming thereof

Etch process for recessing polysilicon in trench structures

Low temperature oxidation of conductive layers for semiconductor fabrication

Semiconductor structures and manufacturing methods

Collar formation by selective oxide deposition

Low temperature self-aligned collar formation

Optical measurement system and method

SIEMENS AG

Method of forming a trench capacitor using a rutile dielectric material

Measurement system and method for measuring critical dimensions using ellipsometry

Method of forming deep trench capacitors

Method and apparatus for evaluating internal film stress at high lateral resolution

INFINEON TECHNOLOGIES CORP

Single sided buried strap

Buried strap poly etch back (BSPE) process

QIMONDA AG

Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate

BRANDNER MARCO

Layer structure and use thereof to form a ceramic layer structure between an interconnect and a cathode of a high-temperature fuel cell