Inventor
GENZ OLIVER
US12 patents
⚠️ This page may combine multiple inventors who share the name “GENZ OLIVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
10 patentsUS6670235B1Dec 30, 2003
Process flow for two-step collar in DRAM preparation
INFINEON TECHNOLOGIES AG16 citations84
US6387771B1May 14, 2002
Low temperature oxidation of conductive layers for semiconductor fabrication
INFINEON TECHNOLOGIES AG18 citations83
US6740594B2May 25, 2004
Method for removing carbon-containing polysilane from a semiconductor without stripping
INFINEON TECHNOLOGIES AG12 citations73
US6352893B1Mar 5, 2002
Low temperature self-aligned collar formation
INFINEON TECHNOLOGIES AG13 citations73
US7141507B2Nov 28, 2006
Method for production of a semiconductor structure
INFINEON TECHNOLOGIES AG9 citations69
US7018781B2Mar 28, 2006
Method for fabricating a contact hole plane in a memory module
INFINEON TECHNOLOGIES AG9 citations69
US7046363B2May 16, 2006
Optical measurement system and method
INFINEON TECHNOLOGIES AG6 citations62
US7049228B2May 23, 2006
Method for introducing structures which have different dimensions into a substrate
INFINEON TECHNOLOGIES AG1 citations48
US6809800B2Oct 26, 2004
Apparatus for patterning a semiconductor wafer
INFINEON TECHNOLOGIES AG0 citations47
US6558883B2May 6, 2003
Apparatus and method for patterning a semiconductor wafer
INFINEON TECHNOLOGIES AG1 citations47