Inventor
ALLEN ROBERT F
US17 patents
⚠️ This page may combine multiple inventors who share the name “ALLEN ROBERT F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
7 patentsUS5961369AOct 5, 1999
Methods for the in-process detection of workpieces with a monochromatic light source
SPEEDFAM IPEC CORP61 citations95
US6292708B1Sep 18, 2001
Distributed control system for a semiconductor wafer processing machine
SPEEDFAM IPEC CORP62 citations94
US5993289ANov 30, 1999
Methods for the in-process detection of workpieces in a CMP environment
SPEEDFAM IPEC CORP19 citations92
US6033521AMar 7, 2000
Tilt mechanism for wafer cassette
SPEEDFAM IPEC CORP18 citations91
US5975986ANov 2, 1999
Index table and drive mechanism for a chemical mechanical planarization machine
SPEEDFAM IPEC CORP18 citations91
US6296546B1Oct 2, 2001
Index table and drive mechanism for a chemical mechanical planarization machine
SPEEDFAM IPEC CORP8 citations72
US6190118B1Feb 20, 2001
Tilt mechanism for wafer cassette
SPEEDFAM IPEC CORP8 citations72
EASTMAN KODAK CO
5 patentsUS5044144ASep 3, 1991
Apparatus and method for forming and loading a magazine for prewound spools of web material
EASTMAN KODAK CO86 citations93
US4101325AJul 18, 1978
Conduit and method for processing webs with a liquid solution
EASTMAN KODAK CO3 citations62
US3968510AJul 6, 1976
Conduit for processing webs with a liquid solution
EASTMAN KODAK CO4 citations62
US5125254AJun 30, 1992
Apparatus for forming a very open shell for lateral loading of product
EASTMAN KODAK CO4 citations59
US4025937AMay 24, 1977
Web transport apparatus
EASTMAN KODAK CO5 citations54