Inventor

LOO DAVID

US3 patents

⚠️ This page may combine multiple inventors who share the name “LOO DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6625003B2Sep 23, 2003

Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck

APPLIED MATERIALS INC22 citations89

US6875927B2Apr 5, 2005

High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications

APPLIED MATERIALS INC4 citations60

R3D3 INC

1 patent

US9975795B2May 22, 2018

Waste processing method and apparatus

R3D3 INC0 citations22