Inventor
NGAN KENNY K
US7 patents
Patents
7 patentsUS5434044AJul 18, 1995
Method for the formation of tin barrier layer with preferential (111) crystallographic orientation
APPLIED MATERIALS INC41 citations95
US5242860ASep 7, 1993
Method for the formation of tin barrier layer with preferential (111) crystallographic orientation
APPLIED MATERIALS INC91 citations95
US5378660AJan 3, 1995
Barrier layers and aluminum contacts
APPLIED MATERIALS INC98 citations94
US5360996ANov 1, 1994
Titanium nitride/titanium silicide multiple layer barrier with preferential (111) crystallographic orientation on titanium nitride surface
APPLIED MATERIALS INC29 citations92
US5961793AOct 5, 1999
Method of reducing generation of particulate matter in a sputtering chamber
APPLIED MATERIALS INC49 citations91
US6625003B2Sep 23, 2003
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
APPLIED MATERIALS INC22 citations89
US5504043AApr 2, 1996
Barrier layers and aluminum contacts
APPLIED MATERIALS INC18 citations80