Inventor
SARANLI AFSAR
CA6 patents
Patents
6 patentsUS7137309B2Nov 21, 2006
High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
PHOTON DYNAMICS INC28 citations91
US7084970B2Aug 1, 2006
Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
PHOTON DYNAMICS INC34 citations91
US7077019B2Jul 18, 2006
High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
PHOTON DYNAMICS INC36 citations91
US7180084B2Feb 20, 2007
Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
PHOTON DYNAMICS INC27 citations90
US7386161B2Jun 10, 2008
Method and apparatus for flat patterned media inspection
PHOTON DYNAMICS INC13 citations83
US7041998B2May 9, 2006
Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
PHOTON DYNAMICS INC10 citations71