Inventor
MCLOUGHLIN ROBERT F
US28 patents
⚠️ This page may combine multiple inventors who share the name “MCLOUGHLIN ROBERT F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
16 patentsUS7740024B2Jun 22, 2010
System and method for flow monitoring and control
ENTEGRIS INC70 citations97
US7476087B2Jan 13, 2009
Pump controller for precision pumping apparatus
ENTEGRIS INC58 citations96
US7543596B2Jun 9, 2009
Liquid flow controller and precision dispense apparatus and system
ENTEGRIS INC36 citations95
US7684446B2Mar 23, 2010
System and method for multiplexing setpoints
ENTEGRIS INC42 citations92
US7610117B2Oct 27, 2009
System and method for flow monitoring and control
ENTEGRIS INC20 citations92
US7494265B2Feb 24, 2009
System and method for controlled mixing of fluids via temperature
ENTEGRIS INC43 citations92
US7107128B2Sep 12, 2006
System for controlling fluid flow
ENTEGRIS INC18 citations92
US7726876B2Jun 1, 2010
System and method for non-intrusive thermal monitor
ENTEGRIS INC35 citations89
US8015995B2Sep 13, 2011
System and method for flow monitoring and control
ENTEGRIS INC7 citations84
US7965208B2Jun 21, 2011
Auto ranging system and method for analog signal
ENTEGRIS INC12 citations84
US7946751B2May 24, 2011
Method for controlled mixing of fluids via temperature
ENTEGRIS INC7 citations84
US7940664B2May 10, 2011
I/O systems, methods and devices for interfacing a pump controller
ENTEGRIS INC11 citations84
US7317971B2Jan 8, 2008
System for controlling fluid flow based on a valve break point
ENTEGRIS INC13 citations84
US9262361B2Feb 16, 2016
I/O systems, methods and devices for interfacing a pump controller
ENTEGRIS INC3 citations73
US7443483B2Oct 28, 2008
Systems and methods for fluid flow control in an immersion lithography system
ENTEGRIS INC5 citations63
US8939428B2Jan 27, 2015
Liquid flow controller and precision dispense apparatus and system
ENTEGRIS INC3 citations62
MYKROLIS CORP
4 patentsUS7029238B1Apr 18, 2006
Pump controller for precision pumping apparatus
MYKROLIS CORP101 citations96
US6348098B1Feb 19, 2002
Flow controller
MYKROLIS CORP62 citations95
US6973375B2Dec 6, 2005
System and method for flow monitoring and control
MYKROLIS CORP39 citations92
US6527862B2Mar 4, 2003
Flow controller
MYKROLIS CORP11 citations73
LAVERDIERE MARC
3 patentsUS8082946B2Dec 27, 2011
Liquid flow controller and precision dispense apparatus and system
LAVERDIERE MARC565 citations98
US8430120B2Apr 30, 2013
Liquid flow controller and precision dispense apparatus and system
LAVERDIERE MARC7 citations83
US8082066B2Dec 20, 2011
System for controlling valve fluid flow based on rate of change of close rate acceleration
LAVERDIERE MARC7 citations83