Inventor
CLARKE MICHAEL
US21 patents
⚠️ This page may combine multiple inventors who share the name “CLARKE MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
4 patentsUS7407594B2Aug 5, 2008
Liquid filtration device
ENTEGRIS INC18 citations92
US7726876B2Jun 1, 2010
System and method for non-intrusive thermal monitor
ENTEGRIS INC35 citations89
US7443483B2Oct 28, 2008
Systems and methods for fluid flow control in an immersion lithography system
ENTEGRIS INC5 citations63
US7572367B2Aug 11, 2009
Liquid filtration device
ENTEGRIS INC2 citations62