Inventor
WAKKER REMKO
NL5 patents
⚠️ This page may combine multiple inventors who share the name “WAKKER REMKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7777863B2Aug 17, 2010
Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate
ASML NETHERLANDS BV10 citations80
US7830495B2Nov 9, 2010
Lithographic apparatus and position sensor
ASML NETHERLANDS BV4 citations58
US7978308B2Jul 12, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7808612B2Oct 5, 2010
Lithographic apparatus and method for masking a substrate
ASML NETHERLANDS BV1 citations48