Inventor
SMEETS ERIK MARIE JOSE
NL8 patents
⚠️ This page may combine multiple inventors who share the name “SMEETS ERIK MARIE JOSE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7359030B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV92 citations96
US7777863B2Aug 17, 2010
Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate
ASML NETHERLANDS BV10 citations80
US7936447B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7808612B2Oct 5, 2010
Lithographic apparatus and method for masking a substrate
ASML NETHERLANDS BV1 citations48
US7398177B2Jul 8, 2008
Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method
ASML NETHERLANDS BV0 citations47