Inventor
TAKETOMI NAOYUKI
JP6 patents
Patents
6 patentsUS7388674B2Jun 17, 2008
Laser tracking interferometer
MITUTOYO CORP9 citations82
US10162041B2Dec 25, 2018
Measurement system using tracking-type laser interferometer and return method of the measurement system
MITUTOYO CORP5 citations69
US7538888B2May 26, 2009
Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer
MITUTOYO CORP6 citations61
US7408650B2Aug 5, 2008
Optical-axis deflection type laser interferometer, calibration method thereof, correcting method thereof, and measuring method thereof
MITUTOYO CORP5 citations60
US7872733B2Jan 18, 2011
Tracking type laser interferometer and method for resetting the same
MITUTOYO CORP4 citations52
US7599070B2Oct 6, 2009
Optical axis polarization type laser interferometer
MITUTOYO CORP1 citations49