Inventor
KIMBALL CHRISTOPHER
US19 patents
Patents
19 patentsUS9101038B2Aug 4, 2015
Electrostatic chuck including declamping electrode and method of declamping
LAM RES CORP60 citations95
US7994794B2Aug 9, 2011
Methods for measuring a set of electrical characteristics in a plasma
LAM RES CORP15 citations92
US7723994B2May 25, 2010
Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma
LAM RES CORP16 citations92
US7479207B2Jan 20, 2009
Adjustable height PIF probe
LAM RES CORP17 citations92
US9922857B1Mar 20, 2018
Electrostatically clamped edge ring
LAM RES CORP13 citations84
US7699634B2Apr 20, 2010
High power electrical connector for a laminated heater
LAM RES CORP9 citations80
US11848177B2Dec 19, 2023
Multi-plate electrostatic chucks with ceramic baseplates
LAM RES CORP4 citations74
US7319316B2Jan 15, 2008
Apparatus for measuring a set of electrical characteristics in a plasma
LAM RES CORP8 citations74
US10923380B2Feb 16, 2021
Electrostatically clamped edge ring
LAM RES CORP2 citations73
US11967517B2Apr 23, 2024
Electrostatic chuck with ceramic monolithic body
LAM RES CORP2 citations72
US10002782B2Jun 19, 2018
ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
LAM RES CORP3 citations69
US7867355B2Jan 11, 2011
Adjustable height PIF probe
LAM RES CORP5 citations63
US12451335B2Oct 21, 2025
Multi-plate electrostatic chucks with ceramic baseplates
LAM RES CORP0 citations62
US11935776B2Mar 19, 2024
Electrostatically clamped edge ring
LAM RES CORP0 citations62
US12548737B2Feb 10, 2026
Polymeric coating for semiconductor processing chamber components
LAM RES CORP0 citations60
US12129569B2Oct 29, 2024
Method for conditioning semiconductor processing chamber components
LAM RES CORP0 citations60
US12444570B2Oct 14, 2025
Electrostatic chuck heater resistance measurement to approximate temperature
LAM RES CORP0 citations56
US10804129B2Oct 13, 2020
Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode
LAM RES CORP0 citations52
US12562350B2Feb 24, 2026
Moveable edge rings for plasma processing systems
LAM RES CORP0 citations47