Inventor

SHIOZAWA TOSHIHIKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “SHIOZAWA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US8372761B2Feb 12, 2013

Plasma oxidation processing method, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD9 citations83

US7972973B2Jul 5, 2011

Method for forming silicon oxide film, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD3 citations62

US7910495B2Mar 22, 2011

Plasma oxidizing method, plasma processing apparatus, and storage medium

TOKYO ELECTRON LTD5 citations61

US8043979B2Oct 25, 2011

Plasma oxidizing method, storage medium, and plasma processing apparatus

TOKYO ELECTRON LTD0 citations51

US8003484B2Aug 23, 2011

Method for forming silicon oxide film, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD0 citations41

HORI MASARU

1 patent

US8119530B2Feb 21, 2012

Pattern forming method and semiconductor device manufacturing method

HORI MASARU184 citations98

UNIV NAGOYA NAT UNIV CORP

1 patent

US7989364B2Aug 2, 2011

Plasma oxidation processing method

UNIV NAGOYA NAT UNIV CORP2 citations62