Inventor
DANDL RAPHAEL A
US14 patents
⚠️ This page may combine multiple inventors who share the name “DANDL RAPHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MICROWAVE PLASMA CONCE
7 patentsUS5370765ADec 6, 1994
Electron cyclotron resonance plasma source and method of operation
APPLIED MICROWAVE PLASMA CONCE118 citations97
US5203960AApr 20, 1993
Method of operation of electron cyclotron resonance plasma source
APPLIED MICROWAVE PLASMA CONCE94 citations95
US5133826AJul 28, 1992
Electron cyclotron resonance plasma source
APPLIED MICROWAVE PLASMA CONCE93 citations95
US5707452AJan 13, 1998
Coaxial microwave applicator for an electron cyclotron resonance plasma source
APPLIED MICROWAVE PLASMA CONCE44 citations92
US4641060AFeb 3, 1987
Method and apparatus using electron cyclotron heated plasma for vacuum pumping
APPLIED MICROWAVE PLASMA CONCE47 citations92
US5003225AMar 26, 1991
Method and apparatus for producing intense microwave pulses
APPLIED MICROWAVE PLASMA CONCE21 citations81
US4733133AMar 22, 1988
Method and apparatus for producing microwave radiation
APPLIED MICROWAVE PLASMA CONCE17 citations73
TOKYO ELECTRON LTD
4 patentsUS6729850B2May 4, 2004
Applied plasma duct system
TOKYO ELECTRON LTD8 citations72
US6559601B1May 6, 2003
Plasma vacuum pump
TOKYO ELECTRON LTD9 citations68
US6873113B2Mar 29, 2005
Stand alone plasma vacuum pump
TOKYO ELECTRON LTD5 citations62
US6422825B2Jul 23, 2002
Plasma vacuum pumping cell
TOKYO ELECTRON LTD6 citations57