P

Inventor

MAEDA HIRONORI

JP37 patents
⚠️ This page may combine multiple inventors who share the name “MAEDA HIRONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

19 patents
US9283720B2Mar 15, 2016

Position detection apparatus, imprint apparatus, and position detection method

CANON KK19 citations92
US8922786B2Dec 30, 2014

Detector, imprint apparatus, and article manufacturing method

CANON KK9 citations83
US10656541B2May 19, 2020

Measurement apparatus, exposure apparatus, and method of manufacturing article

CANON KK5 citations73
US9939741B2Apr 10, 2018

Lithography apparatus, and method of manufacturing article

CANON KK2 citations73
US9400436B2Jul 26, 2016

Detection device, exposure apparatus, and device manufacturing method using same

CANON KK4 citations73
US7580116B2Aug 25, 2009

Exposure apparatus and device fabrication method

CANON KK7 citations73
US11231573B2Jan 25, 2022

Position detection apparatus, exposure apparatus, and article manufacturing method

CANON KK3 citations70
US11333986B2May 17, 2022

Detection apparatus, exposure apparatus, and article manufacturing method

CANON KK0 citations62
US9523927B2Dec 20, 2016

Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method

CANON KK2 citations62
US12061079B2Aug 13, 2024

Detection method, detection apparatus, lithography apparatus, and article manufacturing method

CANON KK0 citations52
US9639000B2May 2, 2017

Position detector, position detection method, exposure apparatus, and method of manufacturing device

CANON KK0 citations52
US8345220B2Jan 1, 2013

Aberration measurement method, exposure apparatus, and device manufacturing method

CANON KK0 citations52
US8345221B2Jan 1, 2013

Aberration measurement method, exposure apparatus, and device manufacturing method

CANON KK0 citations52
US8049891B2Nov 1, 2011

Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method

CANON KK1 citations52
US11169452B2Nov 9, 2021

Measurement apparatus, exposure apparatus, and method of manufacturing article

CANON KK0 citations51
US9645514B2May 9, 2017

Imprint apparatus, imprint method, and device manufacturing method

CANON KK0 citations51
US12366812B2Jul 22, 2025

Detection apparatus, detection method, exposure apparatus and article manufacturing method

CANON KK0 citations47
US9869936B2Jan 16, 2018

Detection apparatus, measurement apparatus, lithography apparatus, and method of manufacturing article

CANON KK0 citations41
US9718234B2Aug 1, 2017

Imprint lithography apparatus and device manufacturing method therefor

CANON KK0 citations41

MAEDA HIRONORI

8 patents

ADVANTEST CORP

3 patents

TAKASAGO PERFUMERY CO LTD

3 patents

YAMADA SHINYA

2 patents

MINODA KEN

1 patent

SASAGURI SHIRO

1 patent