Inventor

ZDRAVKOV ALEXANDER NIKOLOV

NL5 patents

⚠️ This page may combine multiple inventors who share the name “ZDRAVKOV ALEXANDER NIKOLOV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AUER-JONGEPIER SUZAN LEONIE

1 patent

US8634052B2Jan 21, 2014

Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table

AUER-JONGEPIER SUZAN LEONIE3 citations52

ROSET NIEK JACOBUS JOHANNES

1 patent

US8659742B2Feb 25, 2014

Lithographic apparatus and a device manufacturing method

ROSET NIEK JACOBUS JOHANNES0 citations45

JACOBS HERNES

1 patent

US8416383B2Apr 9, 2013

Lithographic apparatus and method

JACOBS HERNES0 citations45

ASML NETHERLANDS BV

1 patent

US9778574B2Oct 3, 2017

Apparatus, a device and a device manufacturing method

ASML NETHERLANDS BV0 citations43

LAFARRE RAYMOND WILHELMUS LOUIS

1 patent

US8941815B2Jan 27, 2015

Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method

LAFARRE RAYMOND WILHELMUS LOUIS0 citations36