Inventor

TAN MARK K

US2 patents

⚠️ This page may combine multiple inventors who share the name “TAN MARK K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US10483142B1Nov 19, 2019

Vacuum robot positioning system with reduced sensitivity to chamber pressure

LAM RES CORP10 citations81

NOVELLUS SYSTEMS INC

1 patent

US8985935B2Mar 24, 2015

Mass damper for semiconductor wafer handling end effector

NOVELLUS SYSTEMS INC11 citations78