Inventor
FUNAOKA KOUJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUNAOKA KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS9634456B2Apr 25, 2017
Gas laser oscillation apparatus of orthogonal excitation type
MITSUBISHI ELECTRIC CORP1 citations45
US9502850B2Nov 22, 2016
Gas laser device
MITSUBISHI ELECTRIC CORP0 citations34
US10211589B2Feb 19, 2019
Laser apparatus and extreme ultraviolet light generation apparatus
MITSUBISHI ELECTRIC CORP0 citations31