Inventor
PALOMBA STEFANO
US3 patents
Patents
3 patentsUS9696264B2Jul 4, 2017
Apparatus and methods for determining defect depths in vertical stack memory
KLA TENCOR CORP21 citations91
US10317347B2Jun 11, 2019
Determining information for defects on wafers
KLA TENCOR CORP2 citations70
US10571407B2Feb 25, 2020
Determining information for defects on wafers
KLA TENCOR CORP0 citations49