Inventor
BADAM VIJAY KUMAR
AT6 patents
⚠️ This page may combine multiple inventors who share the name “BADAM VIJAY KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
3 patentsUS9245777B2Jan 26, 2016
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
LAM RES AG11 citations80
US9748120B2Aug 29, 2017
Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
LAM RES AG6 citations65
US9685358B2Jun 20, 2017
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
LAM RES AG0 citations48