Inventor
CONSTANT ANDREW
US5 patents
Patents
5 patentsUS7833351B2Nov 16, 2010
Batch processing platform for ALD and CVD
APPLIED MATERIALS INC12 citations82
US9696097B2Jul 4, 2017
Multi-substrate thermal management apparatus
APPLIED MATERIALS INC8 citations81
US10361104B2Jul 23, 2019
Ambient controlled transfer module and process system
APPLIED MATERIALS INC3 citations70
US11047039B2Jun 29, 2021
Substrate carrier having hard mask
APPLIED MATERIALS INC0 citations58
US10818525B2Oct 27, 2020
Ambient controlled transfer module and process system
APPLIED MATERIALS INC0 citations49