Inventor
PACITTI EVELYN WALLIS
NL4 patents
Patents
4 patentsUS10514615B2Dec 24, 2019
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations69
US10719019B2Jul 21, 2020
Substrate holder and a method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations67
US11664264B2May 30, 2023
Lithographic apparatus, method for unloading a substrate and method for loading a substrate
ASML NETHERLANDS BV2 citations66
US10768535B2Sep 8, 2020
Support apparatus, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48