Inventor
LEE LIEQUAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “LEE LIEQUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
11 patentsUS9412673B2Aug 9, 2016
Multi-model metrology
KLA TENCOR CORP10 citations83
US11378451B2Jul 5, 2022
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA TENCOR CORP3 citations70
US11156548B2Oct 26, 2021
Measurement methodology of advanced nanostructures
KLA TENCOR CORP6 citations69
US10794839B2Oct 6, 2020
Visualization of three-dimensional semiconductor structures
KLA TENCOR CORP4 citations69
US10732515B2Aug 4, 2020
Detection and measurement of dimensions of asymmetric structures
KLA TENCOR CORP3 citations66
US10393647B1Aug 27, 2019
System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement
KLA TENCOR CORP4 citations66
US10190868B2Jan 29, 2019
Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing
KLA TENCOR CORP2 citations66
US11380594B2Jul 5, 2022
Automatic optimization of measurement accuracy through advanced machine learning techniques
KLA TENCOR CORP1 citations59
US11422095B2Aug 23, 2022
Scatterometry modeling in the presence of undesired diffraction orders
KLA TENCOR CORP0 citations44
US10678226B1Jun 9, 2020
Adaptive numerical aperture control method and system
KLA TENCOR CORP0 citations41
US10648793B2May 12, 2020
Library expansion system, method, and computer program product for metrology
KLA TENCOR CORP0 citations41