Inventor
XI QINGPO
US12 patents
⚠️ This page may combine multiple inventors who share the name “XI QINGPO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS11469074B2Oct 11, 2022
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV3 citations73
US12191109B2Jan 7, 2025
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US12033830B2Jul 9, 2024
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV1 citations62
US11676792B2Jun 13, 2023
Sample pre-charging methods and apparatuses for charged particle beam inspection
ASML NETHERLANDS BV0 citations62
US12165830B2Dec 10, 2024
Multiple charged-particle beam apparatus with low crosstalk
ASML NETHERLANDS BV0 citations55
US12278081B2Apr 15, 2025
System and method for alignment of secondary beams in multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations52
US11614416B2Mar 28, 2023
System and method for aligning electron beams in multi-beam inspection apparatus
ASML NETHERLANDS BV0 citations50
US11961698B2Apr 16, 2024
Replaceable module for a charged particle apparatus
ASML NETHERLANDS BV0 citations44