Inventor
LO YU-FA
TW13 patents
Patents
13 patentsUS11553581B2Jan 10, 2023
Radiation source apparatus and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11533799B1Dec 20, 2022
System and method for supplying target material in an EUV light source
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11809083B2Nov 7, 2023
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12523937B2Jan 13, 2026
Protective ring structure for vacuum interface and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12096543B2Sep 17, 2024
Method for using radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11653438B2May 16, 2023
Droplet collecting system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11537053B2Dec 27, 2022
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12235586B2Feb 25, 2025
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12167526B2Dec 10, 2024
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12066761B2Aug 20, 2024
Inspection tool for an extreme ultraviolet radiation source to observe tin residual
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11528797B2Dec 13, 2022
Method and system for generating droplets for EUV photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11442365B1Sep 13, 2022
EUV photolithography system and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12063734B2Aug 13, 2024
Droplet generator assembly and method of replacing components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50