Inventor
UEDA SHINJIROO
JP10 patents
Patents
10 patentsUS5442183AAug 15, 1995
Charged particle beam apparatus including means for maintaining a vacuum seal
HITACHI LTD47 citations95
US5177448AJan 5, 1993
Synchrotron radiation source with beam stabilizers
HITACHI LTD142 citations95
US5062771ANov 5, 1991
Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber
HITACHI LTD48 citations93
US5254856AOct 19, 1993
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
HITACHI LTD43 citations92
US5020969AJun 4, 1991
Turbo vacuum pump
HITACHI LTD55 citations91
US4835114AMay 30, 1989
Method for LPCVD of semiconductors using oil free vacuum pumps
HITACHI LTD36 citations90
US5122175AJun 16, 1992
Method of and apparatus for producing superpure nitrogen
HITACHI LTD11 citations71
US4732530AMar 22, 1988
Turbomolecular pump
HITACHI LTD8 citations71
US4853640AAug 1, 1989
Synchrotron radiation source
HITACHI LTD5 citations60
US4994753AFeb 19, 1991
Synchrotron radiation source
HITACHI LTD0 citations50