Inventor
CHO SOON-CHEON
KR6 patents
⚠️ This page may combine multiple inventors who share the name “CHO SOON-CHEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
5 patentsUS10981184B2Apr 20, 2021
Coating apparatus and coating method
SEMES CO LTD1 citations56
US12518949B2Jan 6, 2026
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations49
US12417897B2Sep 16, 2025
Plasma processing apparatus and plasma processing method using the same
SEMES CO LTD0 citations46
US10622226B2Apr 14, 2020
Method and apparatus for cleaning component of substrate processing apparatus
SEMES CO LTD0 citations42
US11967491B2Apr 23, 2024
Method and apparatus for parts cleaning
SEMES CO LTD0 citations41