Inventor
SONG JONGMIN
KR3 patents
Patents
3 patentsUS12074051B2Aug 27, 2024
Teaching apparatus and substrate alignment apparatus using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US11280753B2Mar 22, 2022
Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor
SAMSUNG ELECTRONICS CO LTD0 citations56
US11169449B2Nov 9, 2021
Measuring apparatus for vacuum chamber and measuring system including the same
SAMSUNG ELECTRONICS CO LTD0 citations45